Description

Halocarbon 14 (Tetrafluoromethane) (CF4) is a colorless, nontoxic, nonflammable, noncorrosive gas with a slight ether-like odor. Halocarbon 14 is normally compressed and shipped at high pressure.

Applications

Halocarbon 14 is combined with Oxygen to etch Polysilicon, Silicon Dioxide, Silicon Nitrite, some Metals and Metal Silicides. It can be combined with Halocarbon 116 or used alone to clean wafers and chambers.

Safety Data: Click here for our printable MSDS

Specifications

Purity	99.9995%
Nitrogen	< 1.0 ppm
Oxygen	< 1.0 ppm
Halocarbon 116	< 1.0 ppm
Carbon Monoxide / Carbon Dioxide	< 0.5 ppm
Sulfur Hexafluoride	< 0.5 ppm
Moisture	< 1.0 ppm

Cylinder Data
Valve	CGA 580 Brass / 320 Brass 716 SS Diaphragm Packless
Cylinder Size	200 (44L)
Contents	70lb
Cylinder Pressure	2,000 psig

Chemical & Physical Properties
Molecular Weight	88.0
Specific Volume	4.39 CF/lb

Shipping Data
DOT Label	Green, Nonflammable Gas
DOT Class	2.2
CAS No.:	75-73-0
UN Number	1982