Description

Halocarbon 23 (Trifluoromethane)(CHF3) is a colorless, nontoxic, nonflammable gas with a slightly ethereal odor. Contact with liquid may cause frostbite. Shipped as a liquefied gas under its own vapor pressure (635 psig @ 70°F).

Applications

Halocarbon 23 is often used in combination with Halocarbon 14 and Halocarbon 116 to improve etch rate, selectivity and uniformity in etching.

Safety Data: Click here for our printable MSDS

Specifications

Purity	99.995%
Nitrogen	< 15 ppm
Oxygen	< 5 ppm
Acidity	< 0.1 ppm
Carbon Dioxide	< 10 ppm
Water	< 5 ppm

Cylinder Data
Valve	CGA 660 Brass / 320 Brass /716 SS Diaphragm Packless
Cylinder Size	200 (44L)
Contents	70lb
Cylinder Pressure	635 psig

Chemical & Physical Properties
Molecular Weight	70.01
Specific Volume	5.5 CF/lb

Shipping Data
DOT Label	Green, Nonflammable Gas
DOT Class	2.2
CAS No.:	75-46-7
UN Number	1984