Description

Halocarbon 218 (Perfluoropropane)(C3F8) is a colorless, nonflammable, nontoxic gas which is relatively stable and has a faintly sweet odor. Halocarbon 218 is shipped as a liquefied gas under its own vapor pressure (100 psig @ 70° F).

Applications

Halocarbon 218 is used for plasma etching. The chemical composition of Halocarbon 218 supplies a higher ratio of Fluorine to Carbon than any of the other Halocarbon gases supplied by Electronic Fluorocarbons LLC. When Halocarbon 218 is exposed to the RF field generated in the etch process, a gas plasma is produced that will etch Silicon Dioxide or Silicon Nitrite with exellent selectivity.

Safety Data: Click here for our printable MSDS

Specifications

Purity	99.96%	99.99%
Nitrogen	< 230 ppmv	< 40 ppmv
Oxygen	< 20 ppmv	< 10 ppmv
Carbon Dioxide	< 10 ppmv	< 5 ppmv
Other Halocarbons	< 50 ppmv	< 40 ppmv
Moisture	< 10 ppmv	< 10 ppmv

Cylinder Data
Valve	CGA 660 Brass / 320 Brass /716 SS Diaphragm Packless
Cylinder Size	200 (44L)
Contents	95lb
Cylinder Pressure	100 psig

Chemical & Physical Properties
Molecular Weight	188.02
Specific Volume	2.02 CF/lb

Shipping Data
DOT Label	Green, Nonflammable Gas
DOT Class	2.2
CAS No.:	76-19-7
UN Number	2424