Description

Halocarbon c-318 (octafluorocyclobutane)(C4F8) is a colorless, nonflammable, nontoxic, odorless gas. Halocarbon c-318 is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70 °F).

Applications

Halocarbon 318 is used for plasma etching. When Halocarbon 318 is exposed to the RF field generated in the etch process, a gas plasma is produced that will etch silicon compounds with excellent selectivity.

Safety Data: Click here for our printable MSDS

Specifications

Purity	99.98%	99.995%
Nitrogen	< 80 ppmv	< 8 ppmv
Oxygen	< 20 ppmv	< 2 ppmv
Moisture	< 10 ppmv	< 3 ppmv
Other Halocarbons	< 50 ppmv	< 10 ppmv
Acidity	< 0.1 ppm w/w	< 0.1 ppm w/w

Cylinder Data
Valve	CGA 660 Brass / 716 SS Diaphragm Packless
Cylinder Size	200 (44L)
Contents	100lb
Cylinder Pressure	25 psig

Chemical & Physical Properties
Molecular Weight	200.03
Specific Volume	1.85 CF/lb

Shipping Data
DOT Label	Green, Nonflammable Gas
DOT Class	2.2
CAS No.:	115-25-3
UN Number	1976