Electronic Fluorocarbons LLC

Halocarbon 32 (Difluoromethane)

Description

Halocarbon 32 (Difluoromethane)(CH2F2) is a colorless, flammable gas with a slight ether-like odor. Halocarbon 32 is shipped as a liquefied gas under its own vapor pressure (207 psig @ 70°F).

Applications

Halocarbon 32 is used for plasma etching and disassociates into reactive fluoride ions in the presence of an RF field.

Safety Data: Click here for our printable MSDS

Specifications

Purity  99.99% 
Nitrogen < 300 ppm
Oxygen < 5 ppm
Moisture < 100 ppm
Other Organics < 10 ppm
   
Cylinder Data
Valve CGA 350 / 724 SS Diaphragm Packless
Cylinder Size 200 (44L) 30 (11L)
Contents 64 lb  
Cylinder Pressure 207 psig  
   
Chemical & Physical Properties
Molecular Weight 52.05
Specific Volume 7.21 scft/lb
   
Shipping Data
DOT Label Flammable Gas
DOT Class 2.1
CAS No.: 75-10-5
UN Number 3252 
   

 

 
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