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Halocarbon 32 (Difluoromethane) |
Description
Halocarbon 32 (Difluoromethane)(CH2F2) is a colorless, flammable gas with a slight ether-like odor. Halocarbon 32 is shipped as a liquefied gas under its own vapor pressure (207 psig @ 70°F).
Applications
Halocarbon 32 is used for plasma etching and disassociates into reactive fluoride ions in the presence of an RF field.
Safety Data: Click here for our printable MSDS
Specifications
| Purity |
99.99% |
| Nitrogen |
< 300 ppm |
| Oxygen |
< 5 ppm |
| Moisture |
< 100 ppm |
| Other Organics |
< 10 ppm |
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| Cylinder Data |
| Valve |
CGA 350 / 724 SS Diaphragm Packless |
| Cylinder Size |
200 (44L) |
30 (11L) |
| Contents |
64 lb |
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| Cylinder Pressure |
207 psig |
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| Chemical & Physical Properties |
| Molecular Weight |
52.05 |
| Specific Volume |
7.21 scft/lb |
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| Shipping Data |
| DOT Label |
Flammable Gas |
| DOT Class |
2.1 |
| CAS No.: |
75-10-5 |
| UN Number |
3252 |
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